Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392033 | Substrate processing apparatus and substrate processing method | Yuichi FURUYA | 2025-08-19 |
| 11862439 | Substrate processing apparatus and charge neutralization method for mounting table | Takahiro KAWAWA, Hideomi Hosaka, Kouichi Nakajima | 2024-01-02 |
| 11862488 | Substrate stage | Yasuyuki Kagaya | 2024-01-02 |
| 10468237 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Naoyuki Suzuki +2 more | 2019-11-05 |
| 10049860 | Substrate processing apparatus | Atsushi Gomi, Tetsuya Miyashita, Shinji Furukawa, Koji Maeda, Naoyuki Suzuki +2 more | 2018-08-14 |
| 9976217 | Film forming method using reversible decomposition reaction | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Kaoru Yamamoto, Satoshi Taga | 2018-05-22 |
| 9896761 | Trap assembly in film forming apparatus | Kaoru Yamamoto, Yasushi Mizusawa | 2018-02-20 |
| 9673078 | Cooling processing apparatus and method for operating the same | Tetsuya Miyashita, Naoyuki Suzuki, Kaoru Yamamoto, Kouji Maeda | 2017-06-06 |
| 9404180 | Deposition device | Kaoru Yamamoto, Atsushi Gomi, Satoshi Taga | 2016-08-02 |
| 9303788 | Load lock device | Tetsuya Miyashita | 2016-04-05 |
| 9293417 | Method for forming barrier film on wiring line | Hidenori Miyoshi | 2016-03-22 |
| 9202728 | Substrate mounting mechanism, and substrate processing apparatus | Atsushi Gomi, Shinji Maekawa, Satoshi Taga, Kaoru Yamamoto | 2015-12-01 |
| 9121515 | Gate valve unit, substrate processing device and substrate processing method thereof | Kaoru Yamamoto, Tetsuya Miyashita | 2015-09-01 |
| 9062374 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Yasushi Mizusawa, Satoshi Taga, Atsushi Gomi, Tatsuo Hatano | 2015-06-23 |
| 8992686 | Mounting table structure, film forming apparatus and raw material recovery method | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Kaoru Yamamoto, Satoshi Taga +1 more | 2015-03-31 |
| 8859422 | Method of forming copper wiring and method and system for forming copper film | Tadahiro Ishizaka, Atsushi Gomi, Takara Kato, Osamu Yokoyama, Takashi Sakuma +5 more | 2014-10-14 |
| 8518181 | Film forming apparatus and film forming method | — | 2013-08-27 |
| 8408025 | Raw material recovery method and trapping mechanism for recovering raw material | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Kaoru Yamamoto, Chiaki Yasumuro | 2013-04-02 |
| 8399353 | Methods of forming copper wiring and copper film, and film forming system | Tadahiro Ishizaka, Atsushi Gomi, Takara Kato, Osamu Yokoyama, Takashi Sakuma +4 more | 2013-03-19 |
| 8349283 | Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same | Atsushi Gomi, Tatsuo Hatano | 2013-01-08 |
| 8277889 | Film formation method and film formation apparatus | Atsushi Gomi, Yasushi Mizusawa, Tatsuo Hatano, Osamu Yokoyama, Satoshi Taga | 2012-10-02 |
| 8273409 | Method for film formation, apparatus for film formation, and computer-readable recording medium | Yasushi Mizusawa, Satoshi Taga, Atsushi Gomi, Tatsuo Hatano | 2012-09-25 |
| 8268078 | Method and apparatus for reducing particle contamination in a deposition system | Kenji Suzuki, Atsushi Gomi, Yasushi Mizusawa | 2012-09-18 |
| 8034406 | Integrated substrate processing in a vacuum processing tool | Tadahiro Ishizaka, Yasushi Mizusawa | 2011-10-11 |
| 7959985 | Method of integrating PEALD Ta-containing films into Cu metallization | Tadahiro Ishizaka, Tsukasa Matsuda, Jacques Faguet, Yasushi Mizusawa | 2011-06-14 |