Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7772111 | Substrate processing method and fabrication process of a semiconductor device | Taro Ikeda, Tadahiro Ishizaka | 2010-08-10 |
| 7708835 | Film precursor tray for use in a film precursor evaporation system and method of using | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Daisuke Kuroiwa, Tadahiro Ishizaka | 2010-05-04 |
| 7638002 | Multi-tray film precursor evaporation system and thin film deposition system incorporating same | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Daisuke Kuroiwa | 2009-12-29 |
| 7501304 | Method of cleaning cover glass having spacer | Meiki Ooseki, Kiyofumi Yamamoto | 2009-03-10 |
| 7488512 | Method for preparing solid precursor tray for use in solid precursor evaporation system | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Daisuke Kuroiwa, Sandra G. Malhotra +2 more | 2009-02-10 |
| 7484315 | Replaceable precursor tray for use in a multi-tray solid precursor delivery system | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Daisuke Kuroiwa | 2009-02-03 |
| 7459396 | Method for thin film deposition using multi-tray film precursor evaporation system | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Daisuke Kuroiwa | 2008-12-02 |
| 7332426 | Substrate processing method and fabrication process of a semiconductor device | Taro Ikeda, Tadahiro Ishizaka | 2008-02-19 |
| 7096645 | Method of and apparatus for packaging rolled article | Katsumi Tashiro | 2006-08-29 |