Issued Patents All Time
Showing 1–25 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12407078 | Tuner, and impedance matching method | Eiki KAMATA | 2025-09-02 |
| 12362151 | Plasma processing apparatus and plasma processing method | Toshifumi KITAHARA, Satoru Kawakami | 2025-07-15 |
| 12340977 | Plasma source and plasma processing apparatus | Kenta Kato | 2025-06-24 |
| 12338532 | Plasma processing method and plasma processing apparatus | Eiki KAMATA, Yoshiyuki Kondo | 2025-06-24 |
| 12315700 | Plasma processing apparatus and ceiling wall | Satoshi Itoh, Masashi Imanaka, Eiki KAMATA, Shigenori Ozaki, Soudai EMORI | 2025-05-27 |
| 12283465 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Satoru Kawakami, Takumi Kabe | 2025-04-22 |
| 12261025 | Plasma processing apparatus | Satoru Kawakami | 2025-03-25 |
| 12243716 | Plasma processing apparatus | Toshifumi KITAHARA | 2025-03-04 |
| 12243718 | Plasma processing method and plasma processing apparatus | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2025-03-04 |
| 12237157 | Plasma measurement method | Eiki KAMATA, Mikio Sato, Mitsutoshi ASHIDA | 2025-02-25 |
| 12205800 | Plasma processing apparatus and plasma processing method | Haruhiko Furuya | 2025-01-21 |
| 12165846 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Haruhiko Furuya | 2024-12-10 |
| 12068208 | Plasma processing apparatus and control method | Yuki Osada | 2024-08-20 |
| 12051564 | Shower plate, plasma processing apparatus and plasma processing method | Satoru Kawakami, Masaki Hirayama | 2024-07-30 |
| 12046455 | Shower plate, lower dielectric member and plasma processing apparatus | Satoru Kawakami, Atsushi Kubo | 2024-07-23 |
| 12046453 | Plasma processing apparatus | Atsushi Kubo, Eiki KAMATA, Nobuhiko Yamamoto | 2024-07-23 |
| 11967485 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2024-04-23 |
| 11929234 | Plasma processing apparatus and lower stage | Sumi Tanaka, Satoru Kawakami, Masaki Hirayama | 2024-03-12 |
| 11923170 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Hiroyuki Yamamoto, Masaki Hirayama | 2024-03-05 |
| 11908663 | Plasma processing apparatus | Toshifumi KITAHARA | 2024-02-20 |
| 11887825 | Control method and plasma processing apparatus | Mikio Sato, Eiki KAMATA | 2024-01-30 |
| 11851234 | Plastic container and method for producing same | Tatsuro Aoki, Takayoshi Hosoya, Hiroaki Awata | 2023-12-26 |
| 11842886 | Plasma processing method and plasma processing apparatus | Hirokazu Ueda, Eiki KAMATA, Mitsutoshi ASHIDA, Isao Gunji | 2023-12-12 |
| 11784085 | Plasma processing apparatus | Eiki KAMATA | 2023-10-10 |
| 11721528 | Plasma processing apparatus and control method | Mikio Sato, Eiki KAMATA | 2023-08-08 |