Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283465 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Taro Ikeda, Satoru Kawakami | 2025-04-22 |
| 10815568 | Gas distribution device and processing apparatus | Michitaka Aita | 2020-10-27 |