Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412732 | Plasma processing apparatus | Kazushi Kaneko, Satoru Kawakami | 2025-09-09 |
| 12407078 | Tuner, and impedance matching method | Taro Ikeda | 2025-09-02 |
| 12338532 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Yoshiyuki Kondo | 2025-06-24 |
| 12315700 | Plasma processing apparatus and ceiling wall | Satoshi Itoh, Masashi Imanaka, Taro Ikeda, Shigenori Ozaki, Soudai EMORI | 2025-05-27 |
| 12283465 | Plasma processing apparatus and plasma processing method | Taro Ikeda, Satoru Kawakami, Takumi Kabe | 2025-04-22 |
| 12243718 | Plasma processing method and plasma processing apparatus | Mikio Sato, Taro Ikeda, Nobuhiko Yamamoto | 2025-03-04 |
| 12237157 | Plasma measurement method | Mikio Sato, Taro Ikeda, Mitsutoshi ASHIDA | 2025-02-25 |
| 12165846 | Plasma processing apparatus and plasma processing method | Taro Ikeda, Haruhiko Furuya | 2024-12-10 |
| 12046453 | Plasma processing apparatus | Taro Ikeda, Atsushi Kubo, Nobuhiko Yamamoto | 2024-07-23 |
| 11967485 | Plasma processing apparatus and plasma processing method | Taro Ikeda, Mikio Sato, Nobuhiko Yamamoto | 2024-04-23 |
| 11887825 | Control method and plasma processing apparatus | Mikio Sato, Taro Ikeda | 2024-01-30 |
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Hirokazu Ueda, Mitsutoshi ASHIDA, Isao Gunji | 2023-12-12 |
| 11784085 | Plasma processing apparatus | Taro Ikeda | 2023-10-10 |
| 11721528 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2023-08-08 |
| 11705310 | Plasma probe device, plasma processing apparatus, and control method | Taro Ikeda, Mikio Sato | 2023-07-18 |
| 11600475 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2023-03-07 |
| 11476088 | Array antenna and plasma processing apparatus | Taro Ikeda, Mikio Sato, Nobuhiko Yamamoto | 2022-10-18 |
| 11410835 | Plasma density monitor, plasma processing apparatus, and plasma processing method | Taro Ikeda, Mikio Sato | 2022-08-09 |
| 11355326 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2022-06-07 |
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Yuki Osada, Hiroyuki Miyashita, Susumu Saito +2 more | 2021-11-02 |