Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412732 | Plasma processing apparatus | Satoru Kawakami, Eiki KAMATA | 2025-09-09 |
| 12191116 | Plasma processing apparatus and plasma processing method | — | 2025-01-07 |
| 11887816 | Plasma processing apparatus | Yohei Ishida | 2024-01-30 |
| 11721524 | Power generation systems and methods for plasma stability and control | Merritt Funk, Chelsea DuBose, Justin Moses, Kazuki Moyama | 2023-08-08 |
| 11587769 | Microwave output device and plasma processing apparatus | Yohei Ishida, Hajime Tamura, Koichi Murai | 2023-02-21 |
| 11569068 | Plasma processing apparatus | Takashi Hasegawa, Koji Koyama, Naoki Matsumoto | 2023-01-31 |
| 11527386 | Plasma processing apparatus | Yohei Ishida | 2022-12-13 |
| 11249126 | Method of determining correction function | Yohei Ishida | 2022-02-15 |
| 11209515 | Method of determining correction function | Yohei Ishida | 2021-12-28 |
| 11094507 | Power generation systems and methods for plasma stability and control | Merritt Funk, Chelsea DuBose, Justin Moses, Kazuki Moyama | 2021-08-17 |
| 11050394 | Modules, multi-stage systems, and related methods for radio frequency power amplifiers | Chelsea DuBose, Merritt Funk, Justin Moses, Kazuki Moyama | 2021-06-29 |
| 11031213 | Microwave output device and plasma processing device | Yuji Onuma | 2021-06-08 |
| 10971337 | Microwave output device and plasma processing apparatus | Yohei Ishida | 2021-04-06 |
| 10879045 | Plasma processing apparatus | Koji Koyama | 2020-12-29 |
| 10847353 | Pulse monitor device and plasma processing apparatus | Yukinori Hanada | 2020-11-24 |
| 10796886 | Detection device, microwave output device and plasma processing apparatus | Yohei Ishida | 2020-10-06 |
| 10748746 | Microwave output device and plasma processing apparatus | Yukinori Hanada | 2020-08-18 |
| 10679826 | Microwave control method | Jun Yoshikawa, Naoki Matsumoto | 2020-06-09 |
| 10662531 | Plasma processing apparatus, abnormality determination method, and microwave generator | Yunosuke Hashimoto, Yohei Ishida | 2020-05-26 |
| 10510513 | Plasma processing device and high-frequency generator | Kazunori Funazaki, Hideo Kato | 2019-12-17 |
| 10109463 | Microwave automatic matcher and plasma processing apparatus | Hideo Kato, Kazunori Funazaki, Yuji Otsuka, Shinji Kawada | 2018-10-23 |
| 10074524 | Plasma processing apparatus and high frequency generator | Kazunori Funazaki, Hideo Kato | 2018-09-11 |
| 9977070 | Method for inspecting magnetron | Hideo Kato, Kazunori Funazaki, Eiji Takahashi | 2018-05-22 |
| 9875882 | Microwave plasma processing apparatus, slot antenna, and semiconductor device | Toshihiko Iwao | 2018-01-23 |
| 9633821 | Microwave plasma processing apparatus and microwave supplying method | Toshihiko Iwao, Satoru Kawakami | 2017-04-25 |