Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387919 | ALD process with plasma treatment | Jianping Zhao, Peter Ventzek | 2025-08-12 |
| 12300466 | Plasma enhanced film formation method | Jianping Zhao | 2025-05-13 |
| 12176204 | Cyclic low temperature film growth processes | Jianping Zhao, Peter Ventzek | 2024-12-24 |
| 11996268 | Plasma processing apparatus and plasma processing method | — | 2024-05-28 |
| 11773484 | Hard mask deposition using direct current superimposed radio frequency plasma | Jianping Zhao, Peter Ventzek | 2023-10-03 |
| 11605536 | Cyclic low temperature film growth processes | Jianping Zhao, Peter Ventzek | 2023-03-14 |
| 11139147 | Plasma processing apparatus | Takaaki Kato | 2021-10-05 |
| 10991549 | Antenna and plasma deposition apparatus | Taro Ikeda | 2021-04-27 |
| 10804077 | Microwave plasma source, microwave plasma processing apparatus and plasma processing method | — | 2020-10-13 |
| 10570512 | Substrate processing apparatus | Takahiro HIRANO, Kiyotaka Ishibashi, Satoru Kawakami | 2020-02-25 |
| 10546725 | Plasma processing apparatus | Takahiro HIRANO | 2020-01-28 |
| 10513777 | Film formation device | Masahide Iwasaki, Satoshi Yonekura | 2019-12-24 |
| 10370763 | Plasma processing apparatus | Takahiro HIRANO, Takaaki Kato | 2019-08-06 |
| 10347466 | Plasma processing apparatus | Takahiro HIRANO | 2019-07-09 |
| 10145014 | Film forming apparatus | Toshihisa Nozawa, Masahide Iwasaki | 2018-12-04 |
| 9947515 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihisa Nozawa, Zhiying Chen +1 more | 2018-04-17 |
| 9875882 | Microwave plasma processing apparatus, slot antenna, and semiconductor device | Kazushi Kaneko | 2018-01-23 |
| 9831067 | Film-forming apparatus | Masahide Iwasaki, Koji Yamagishi, Satoshi Yonekura | 2017-11-28 |
| 9793095 | Microwave surface-wave plasma device | Merritt Funk, Jianping Zhao, Lee Chen, Toshihisa Nozawa, Zhiying Chen +1 more | 2017-10-17 |
| 9633821 | Microwave plasma processing apparatus and microwave supplying method | Kazushi Kaneko, Satoru Kawakami | 2017-04-25 |
| 9305751 | Microwave plasma processing apparatus and microwave supplying method | Kazushi Kaneko, Satoru Kawakami | 2016-04-05 |
| 9111727 | Plasma tuning rods in microwave resonator plasma sources | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2015-08-18 |
| 8808496 | Plasma tuning rods in microwave processing systems | Jianping Zhao, Lee Chen, Merritt Funk, Peter L. G. Ventzek | 2014-08-19 |