Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844489 | Film forming apparatus and shower head | Toshihisa Nozawa, Kohei Yamashita | 2020-11-24 |
| 10734197 | Plasma process apparatus | — | 2020-08-04 |
| 10513777 | Film formation device | Satoshi Yonekura, Toshihiko Iwao | 2019-12-24 |
| 10145014 | Film forming apparatus | Toshihisa Nozawa, Toshihiko Iwao | 2018-12-04 |
| 9887068 | Plasma process apparatus | — | 2018-02-06 |
| 9831067 | Film-forming apparatus | Toshihiko Iwao, Koji Yamagishi, Satoshi Yonekura | 2017-11-28 |
| 9691591 | Plasma processing apparatus | — | 2017-06-27 |
| 9631274 | Plasma processing apparatus | Toshihisa Nozawa, Shinji Komoto | 2017-04-25 |
| 9574267 | Plasma processing apparatus | Toshihisa Nozawa, Shinji Komoto | 2017-02-21 |
| 9275837 | Plasma processing apparatus | Yohei Yamazawa, Naoki Matsumoto, Naohiko Okunishi | 2016-03-01 |
| 8973527 | Plasma processing apparatus, plasma processing method, method for cleaning plasma processing apparatus and pressure control valve for plasma processing apparatus | Toshihisa Nozawa, Shinji Komoto | 2015-03-10 |
| 8967082 | Plasma processing apparatus and gas supply device for plasma processing apparatus | Toshihisa Nozawa | 2015-03-03 |
| 8815014 | Method and system for performing different deposition processes within a single chamber | Jacques Faguet, Toshihisa Nozawa | 2014-08-26 |
| 8628640 | Plasma processing unit and high-frequency electric power supplying unit | Toshihiro Hayami, Junichi Takahira, Kazuyoshi Watanabe, Shinichi Komatsu, Yuichi Sasaki | 2014-01-14 |
| 8262848 | Plasma processing apparatus and method | Tomoaki Ukei | 2012-09-11 |
| 8182869 | Method for controlling temperature of a mounting table | — | 2012-05-22 |
| 7846293 | Plasma processing apparatus and method | Tomoaki Ukei | 2010-12-07 |
| 7789962 | Device and method for controlling temperature of a mounting table, a program therefor, and a processing apparatus including same | — | 2010-09-07 |
| 7419567 | Plasma processing apparatus and method | Koji Miyata | 2008-09-02 |
| 6367429 | Intermediate fluid type vaporizer | Kazuhiko Asada | 2002-04-09 |
| 6164247 | Intermediate fluid type vaporizer, and natural gas supply method using the vaporizer | Shinji EGASHIRA, Tsuyoshi Oda, Kazuhiko Asada, Kuniteru Sugino | 2000-12-26 |