Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Takeda, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |
| 10513777 | Film formation device | Masahide Iwasaki, Toshihiko Iwao | 2019-12-24 |
| 9831067 | Film-forming apparatus | Masahide Iwasaki, Toshihiko Iwao, Koji Yamagishi | 2017-11-28 |