Issued Patents All Time
Showing 1–25 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372875 | Composition for resist pattern metallization process | Wataru SHIBAYAMA, Shuhei Shigaki, Ken ISHIBASHI, Kodai KATO, Makoto Nakajima | 2025-07-29 |
| 12247571 | Motor and fan device | Takahiko Ogane, Hirokazu Takada, Satoshi Nagamoto, Keiichi Hosoi | 2025-03-11 |
| 12227621 | Film-forming composition | Wataru SHIBAYAMA, Yuichi Goto, Shun KUBODERA, Ken ISHIBASHI, Makoto Nakajima | 2025-02-18 |
| 12211706 | Substrate processing device and method of manufacturing substrate processing device | Manabu Nakagawasai | 2025-01-28 |
| 11761799 | Sensor module and protective glass | Shusaku Akiba, Masao Ozeki, Satoshi Kanasugi, Satoshi OGAMI | 2023-09-19 |
| 11640918 | Stage device, power supply mechanism, and processing apparatus | — | 2023-05-02 |
| 11561472 | Radiation sensitive composition | Makoto Nakajima, Kenji Takase, Wataru SHIBAYAMA | 2023-01-24 |
| 11543271 | Sensor module and protective glass | Shusaku Akiba, Masao Ozeki, Satoshi Kanasugi, Satoshi OGAMI | 2023-01-03 |
| 11531269 | Method for producing resist pattern coating composition with use of solvent replacement method | Shuhei Shigaki, Wataru SHIBAYAMA, Makoto Nakajima, Rikimaru Sakamoto | 2022-12-20 |
| 11517809 | Game device, program product, game system and article for games | Wataru Higuchi, Reina FUKUOKA, Yuki KADOTA, Kenichiro Kobayashi | 2022-12-06 |
| 11488824 | Method for manufacturing semiconductor device using silicon-containing resist underlayer film forming composition for solvent development | Makoto Nakajima, Yuta Kanno, Hiroyuki Wakayama | 2022-11-01 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |
| 11215927 | Substrate treating composition and method for fabricating a semiconductor device using the same | Ju Young Kim, Hyunwoo KIM, Makoto Nakajima, Shuhei Shigaki, Wataru SHIBAYAMA | 2022-01-04 |
| 11204266 | Sensor module and protective glass | Shusaku Akiba, Masao Ozeki, Satoshi Kanasugi, Satoshi OGAMI | 2021-12-21 |
| 11175583 | Silicon-containing resist underlayer film-forming composition having phenyl group-containing chromophore | Makoto Nakajima, Wataru SHIBAYAMA, Kenji Takase | 2021-11-16 |
| 11022884 | Silicon-containing resist underlayer film-forming composition having halogenated sulfonylalkyl group | Wataru SHIBAYAMA, Kenji Takase, Makoto Nakajima, Hiroyuki Wakayama, Rikimaru Sakamoto | 2021-06-01 |
| 10783868 | Acoustic air flow resistive article and method of making | — | 2020-09-22 |
| 10372039 | Resist underlayer film forming composition containing silicon having ester group | Yuta Kanno, Makoto Nakajima, Hiroyuki Wakayama | 2019-08-06 |
| 10197917 | Silicon-containing resists underlayer film-forming composition having phenyl group-containing chromophore | Makoto Nakajima, Wataru SHIBAYAMA, Kenji Takase | 2019-02-05 |
| 10139729 | Coating composition for pattern reversal on soc pattern | Hiroaki Yaguchi, Makoto Nakajima, Wataru SHIBAYAMA, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-11-27 |
| 10082735 | Silicon-containing resist underlayer film-forming composition having organic group having aliphatic polycyclic structure | Wataru SHIBAYAMA, Shuhei Shigaki, Makoto Nakajima, Hiroyuki Wakayama, Rikimaru Sakamoto | 2018-09-25 |
| 10079146 | Resist underlayer film forming composition containing silicon containing cyclic organic group having hetero atom | Yuta Kanno, Makoto Nakajima, Kenji Takase, Hiroyuki Wakayama | 2018-09-18 |
| 9978544 | Keyboard apparatus and upper cover for keyboard | Tamotsu Koike, Akihiko Takemae | 2018-05-22 |
| 9831392 | Cover glass for light emitting diode package, sealed structure, and light emitting device | Makoto Shiratori, Yoko MITSUI | 2017-11-28 |
| 9767782 | Acoustic air flow resistive article and method of making | — | 2017-09-19 |