Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11625518 | Learning device, inference device, and learned model | Kosuke Yamamoto, Ken Itabashi, Naoshige FUSHIMI, Kazuyoshi Matsuzaki | 2023-04-11 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Kyoko Ikeda | 2022-03-22 |
| 9970109 | Substrate processing method and substrate processing apparatus | Jun Yoshikawa | 2018-05-15 |