Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2024-01-09 |
| 11761075 | Substrate cleaning apparatus | Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Shuji Moriya | 2023-09-19 |
| 11517943 | Cleaning method and substrate processing apparatus | Kazuya Dobashi | 2022-12-06 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME | 2022-03-22 |
| 10870916 | Gas supply member and gas processing apparatus | — | 2020-12-22 |
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Shuji Moriya | 2020-09-29 |
| 10302816 | Method for lightning forecasting and alert system | Wiebke Kristina Deierling, Matthias Steiner | 2019-05-28 |
| 9939200 | Substrate transfer system and heat treatment apparatus using same | Koyu Hasegawa | 2018-04-10 |
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Sumie Nagaseki, Tatsuro Ohshita | 2016-05-17 |
| 8100147 | Particle-measuring system and particle-measuring method | Hayashi Otsuki, Tsukasa Matsuda | 2012-01-24 |
| 7931945 | Film forming method | Hayashi Otsuki, Tsukasa Matsuda | 2011-04-26 |
| 7894059 | Film formation processing apparatus and method for determining an end-point of a cleaning process | Hayashi Otsuki, Tsukasa Matsuda | 2011-02-22 |
| 7667840 | Particle-measuring system and particle-measuring method | Hayashi Otsuki, Tsukasa Matsuda | 2010-02-23 |
| 7515264 | Particle-measuring system and particle-measuring method | Hayashi Otsuki, Tsukasa Matsuda | 2009-04-07 |
| 7511814 | Particle-measuring system and particle-measuring method | Hayashi Otsuki, Tsukasa Matsuda | 2009-03-31 |
| 7290042 | Server apparatus and system | Yoshiaki Kinoshita | 2007-10-30 |
| 6532069 | Particle-measuring system and particle-measuring method | Hayashi Otsuki, Tsukasa Matsuda | 2003-03-11 |