Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172198 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2024-12-24 |
| 11761075 | Substrate cleaning apparatus | Toshiki HINATA, Kazuya Dobashi, Kyoko Ikeda, Shuji Moriya | 2023-09-19 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2022-03-08 |
| 10882330 | Printer | Shun Komagome | 2021-01-05 |
| 10786837 | Method for cleaning chamber of substrate processing apparatus | Toshiki HINATA, Kazuya Dobashi, Kyoko Ikeda, Shuji Moriya | 2020-09-29 |
| 10421218 | Roller-type depressing device, imprinting device, and roller-type depressing method | Hirosuke Kawaguchi, Yutaka Taniguchi, Masaki Sugiyama, Daisuke Matono, Satoru Tanaka | 2019-09-24 |
| 8070302 | Laminate type light-emitting diode device, and reflection type light-emitting diode unit | Mitsuyuki Hatanaka, Takashi Sato, Kazuo Yamamoto, Koji Uchida, Yasufumi Kawanabe | 2011-12-06 |
| 8057046 | Projector device having assembly of reflection type light emitting diodes | Mitsuyuki Hatanaka, Takashi Sato, Kazuo Yamamoto, Koji Uchida, Yasufumi Kawanabe | 2011-11-15 |
| 7479619 | Thermal processing unit | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu +3 more | 2009-01-20 |
| 7144823 | Thermal treatment apparatus | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Tomohisa Shimazu +3 more | 2006-12-05 |
| 7044731 | Heat treatment apparatus | — | 2006-05-16 |
| 6936108 | Heat treatment device | — | 2005-08-30 |
| 6807971 | Heat treatment apparatus and cleaning method of the same | Hitoshi Murata, Hiroyuki Yamamoto | 2004-10-26 |
| 6805968 | Members for semiconductor manufacturing apparatus and method for producing the same | Hiroshi Sakurai, Kazumi Tani, Kiyoshi Miyajima, Takema Teratani, Tatsuya Hamaguchi | 2004-10-19 |
| 6736636 | Thermal processor with gas supply | — | 2004-05-18 |
| 6383300 | Heat treatment apparatus and cleaning method of the same | Hitoshi Murata, Hiroyuki Yamamoto | 2002-05-07 |
| 6171104 | Oxidation treatment method and apparatus | Hiroyuki Yamamoto | 2001-01-09 |
| 6159298 | Thermal processing system | — | 2000-12-12 |