Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172198 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2024-12-24 |
| 11594417 | Etching method and apparatus | Kazuhito Miyata, Nobuhiro Takahashi, Shunta Furutani, Shoi SUZUKI | 2023-02-28 |
| 11581192 | Etching method and etching apparatus | Nobuhiro Takahashi | 2023-02-14 |
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2022-03-08 |
| 11189498 | Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film | Yasuo ASADA, Jun LIN, Ayano HAGIWARA, Shinji Irie, Kenji Tanouchi +1 more | 2021-11-30 |
| 11011383 | Etching method | Yasuo ASADA, Nobuhiro Takahashi | 2021-05-18 |
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Miyako Kaneko, Satoru Shimura, Masami Yamashita, Itaru Kanno | 2021-05-04 |
| 10835908 | Substrate processing method | Miyako Kaneko, Itaru Kanno | 2020-11-17 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10734243 | Etching method and substrate processing system | Tsuhung Huang, Jun LIN | 2020-08-04 |
| 10665470 | Etching method and etching apparatus | Yasuo ASADA, Shinji Irie, Nobuhiro Takahashi, Ayano HAGIWARA, Tatsuya Yamaguchi | 2020-05-26 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Kazuyuki Mitsuoka, Hiroki Ohno, Takayuki Toshima | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takayuki Toshima | 2018-08-14 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Keisuke Egashira, Yosuke Hachiya, Kotaro Ooishi +2 more | 2018-03-20 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Keiji Tanouchi, Kazuyuki Mitsuoka, Takayuki Toshima | 2018-01-30 |
| 9799538 | Substrate cleaning system | Miyako Kaneko, Itaru Kanno | 2017-10-24 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 9443712 | Substrate cleaning method and substrate cleaning system | Miyako Kaneko, Itaru Kanno | 2016-09-13 |