Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
| 10811283 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2020-10-20 |
| 10121659 | Pattern forming method and heating apparatus | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2018-11-06 |
| 10043652 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno | 2018-08-07 |
| 9953826 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2018-04-24 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Kazuyuki Mitsuoka, Takehiko Orii, Takayuki Toshima | 2018-01-30 |
| 9859118 | Pattern forming method and heating apparatus | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2018-01-02 |
| 9748101 | Substrate treatment method, computer storage medium, and substrate treatment system | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita, Soichiro Okada | 2017-08-29 |
| 9618849 | Pattern forming method, pattern forming apparatus, and computer readable storage medium | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2017-04-11 |
| 9530645 | Pattern forming method, pattern forming apparatus, and non-transitory computer-readable storage medium | Makoto Muramatsu, Takahiro Kitano, Tadatoshi Tomita | 2016-12-27 |
| 7976896 | Method of processing a substrate and apparatus processing the same | Yoshiteru Fukuda, Nobuhiro Ogata, Takayuki Ishii | 2011-07-12 |
| 7781342 | Substrate treatment method for etching a base film using a resist pattern | Mitsuaki Iwashita, Satoru Shimura | 2010-08-24 |