Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima, Hiroaki Inadomi | 2019-02-19 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Mitsuaki Iwashita +4 more | 2019-02-05 |
| 10115609 | Separation and regeneration apparatus and substrate processing apparatus | Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-10-30 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Gen You +3 more | 2018-10-09 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9953840 | Substrate processing method and substrate processing system | Hiroshi Marumoto, Hisashi Kawano, Hiromi Kiyose, Mitsunori Nakamori | 2018-04-24 |
| 9881784 | Substrate processing method, substrate processing apparatus, and storage medium | Hiroki Ohno, Keiji Tanouchi, Takehiko Orii, Takayuki Toshima | 2018-01-30 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Gentaro Goshi, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2014-07-08 |
| 8465596 | Supercritical processing apparatus and supercritical processing method | Takayuki Toshima, Mitsuaki Iwashita, Hidekazu Okamoto, Hideo Namatsu | 2013-06-18 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Hidekazu Hayashi, Yukiko Kitajima +5 more | 2013-02-12 |
| 8168377 | Pattern forming method and method of manufacturing semiconductor device by using the same | Makoto Muramatsu, Mitsuaki Iwashita | 2012-05-01 |
| 7521098 | Method of processing an organic-film | Tadashi Onishi, Minoru Honda, Ryuichi Asako, Mitsuaki Iwashita | 2009-04-21 |
| 7473567 | Change rate prediction method, storage medium, and substrate processing system | Yusuke Saito, Naoyuki Satoh | 2009-01-06 |
| 7348129 | Electron beam processing method and apparatus | Minoru Honda, Song yun Kang, Yusuke Saito | 2008-03-25 |
| 7195936 | Thin film processing method and system | Tadashi Onishi, Manabu Hama, Minoru Honda, Mitsuaki Iwashita | 2007-03-27 |
| 7005660 | Surface processing apparatus | Minoru Honda, Ryo Nonaka | 2006-02-28 |