Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8742721 | Battery charging warehouse | Mitsutaka Shibagaki, Takanori Imai | 2014-06-03 |
| 7867926 | Substrate processing apparatus and method | Naoyuki Satoh, Takeshi Tamura, Hiroyuki Ide | 2011-01-11 |
| 7534467 | Reduced-pressure drying unit and coating film forming method | Takahiro Kitano, Shinichi Sugimoto, Naoya Hirakawa | 2009-05-19 |
| 7195936 | Thin film processing method and system | Tadashi Onishi, Minoru Honda, Kazuyuki Mitsuoka, Mitsuaki Iwashita | 2007-03-27 |
| 6903800 | Film-processing method and film-processing apparatus | Tadashi Onishi | 2005-06-07 |
| 6808566 | Reduced-pressure drying unit and coating film forming method | Takahiro Kitano, Shinichi Sugimoto, Naoya Hirakawa | 2004-10-26 |