Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417928 | Substrate processing method and substrate processing system | Takeo Nakano, Hirokazu Ueda, Ryuichi Asako, Naoki UMESHITA | 2025-09-16 |
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Yoji IIZUKA, Antonio Luis Pacheco Rotondaro, Dipak Aryal, Takeo Nakano +5 more | 2025-09-02 |
| 12276027 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa, Masami Akimoto, Satoshi Kaneko | 2025-04-15 |
| 12247768 | Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method | Koji Akiyama, Hiroyuki Nagai, Hirokazu Ueda | 2025-03-11 |
| 12011738 | Substrate processing method and ionic liquid | Takeo Nakano, Hirokazu Ueda, Naoki UMESHITA, Ryuichi Asako, Kenichi Uki | 2024-06-18 |
| 11171050 | Method for manufacturing a contact pad, method for manufacturing a semiconductor device using same, and semiconductor device | Koichi Yatsuda, Takashi Hayakawa, Takashi Tanaka | 2021-11-09 |
| 11004684 | Forming method of hard mask | Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda, Kazutoshi Iwai +1 more | 2021-05-11 |
| 10224202 | Forming method of hard mask, forming apparatus of hard mask and recording medium | Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda, Kazutoshi Iwai +1 more | 2019-03-05 |
| 10224208 | Plating method and recording medium | Nobutaka Mizutani, Takashi Tanaka | 2019-03-05 |
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Hiroshi Tomita, Kazuyuki Mitsuoka +4 more | 2019-02-05 |
| 10138556 | Plating method, plating apparatus, and storage medium | Nobutaka Mizutani, Takashi Tanaka | 2018-11-27 |
| 10030308 | Plating method, plating system and storage medium | Takashi Tanaka, Yuichiro Inatomi, Nobutaka Mizutani, Yusuke Saito | 2018-07-24 |
| 9966306 | Catalyst layer forming method, catalyst layer forming system and recording medium | Yuichiro Inatomi, Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito, Kazutoshi Iwai | 2018-05-08 |
| 9888585 | Method for manufacturing wiring structure, copper displacement plating solution, and wiring structure | Shoso Shinguhara, Kohei Ota, Nobutaka Mizutani | 2018-02-06 |
| 9837308 | Plating method, plating system and storage medium | Nobutaka Mizutani, Takashi Tanaka, Yuichiro Inatomi, Yusuke Saito | 2017-12-05 |
| 9777379 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2017-10-03 |
| 9731322 | Plating apparatus, plating method and storage medium having plating program stored thereon | Takashi Tanaka, Yusuke Saito, Takayuki Toshima | 2017-08-15 |
| 9725810 | Plating method, plating apparatus and storage medium | Nobutaka Mizutani, Takashi Tanaka | 2017-08-08 |
| 9711363 | Plating method, recording medium and plating system | Nobutaka Mizutani, Takashi Tanaka | 2017-07-18 |
| 9650717 | Pre-treatment method of plating, storage medium, and plating system | Kazutoshi Iwai, Nobutaka Mizutani | 2017-05-16 |
| 9653350 | Pre-treatment method for plating and storage medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito | 2017-05-16 |
| 9653354 | Metal wiring layer forming method, metal wiring layer forming apparatus, and recording medium | Takashi Tanaka, Nobutaka Mizutani | 2017-05-16 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 9552994 | Plating apparatus, plating method, and storage medium | Yuichiro Inatomi, Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito | 2017-01-24 |
| 9523153 | Pre-treatment method for plating and storage medium | Takashi Tanaka, Yuichiro Inatomi, Kazutoshi Iwai | 2016-12-20 |