Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417928 | Substrate processing method and substrate processing system | Takeo Nakano, Hirokazu Ueda, Mitsuaki Iwashita, Ryuichi Asako | 2025-09-16 |
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Yoji IIZUKA, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal +5 more | 2025-09-02 |
| 12011738 | Substrate processing method and ionic liquid | Takeo Nakano, Hirokazu Ueda, Mitsuaki Iwashita, Ryuichi Asako, Kenichi Uki | 2024-06-18 |