KU

Kenichi Uki

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,506,440 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12011738 Substrate processing method and ionic liquid Takeo Nakano, Hirokazu Ueda, Mitsuaki Iwashita, Naoki UMESHITA, Ryuichi Asako 2024-06-18