Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417928 | Substrate processing method and substrate processing system | Takeo Nakano, Mitsuaki Iwashita, Ryuichi Asako, Naoki UMESHITA | 2025-09-16 |
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Yoji IIZUKA, Mitsuaki Iwashita, Antonio Luis Pacheco Rotondaro, Dipak Aryal, Takeo Nakano +5 more | 2025-09-02 |
| 12247768 | Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method | Koji Akiyama, Hiroyuki Nagai, Mitsuaki Iwashita | 2025-03-11 |
| 12112921 | Plasma processing method and plasma processing apparatus | Hiroyuki Ikuta, Yutaka Fujino | 2024-10-08 |
| 12077865 | Film forming method and film forming apparatus | Hideki Yuasa, Hiroyuki Ikuta, Yutaka Fujino, Makoto Wada | 2024-09-03 |
| 12060641 | Film forming method and film forming apparatus | Hideki Yuasa, Yutaka Fujino, Yoshiyuki Kondo, Hiroyuki Ikuta | 2024-08-13 |
| 12011738 | Substrate processing method and ionic liquid | Takeo Nakano, Mitsuaki Iwashita, Naoki UMESHITA, Ryuichi Asako, Kenichi Uki | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Masahito Sugiura, Ryota IFUKU | 2024-04-30 |
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Eiki KAMATA, Mitsutoshi ASHIDA, Isao Gunji | 2023-12-12 |
| 11615957 | Method for forming boron-based film, formation apparatus | Jinwang Li, Masahiro Oka, Yoshimasa Watanabe, Yuuki Yamamoto, Hiroyuki Ikuta | 2023-03-28 |
| 11145522 | Method of forming boron-based film, and film forming apparatus | Yoshimasa Watanabe, Masahiro Oka, Yuuki Yamamoto | 2021-10-12 |
| 10388524 | Film forming method, boron film, and film forming apparatus | Masahiro Oka, Hiraku Ishikawa, Yoshimasa Watanabe, Syuhei Yonezawa | 2019-08-20 |
| 10249498 | Method for using heated substrates for process chemistry control | Peter L. G. Ventzek | 2019-04-02 |
| 9658106 | Plasma processing apparatus and measurement method | Yuuki Kobayashi, Kohei Yamashita, Peter L. G. Ventzek | 2017-05-23 |
| 9472404 | Doping method, doping apparatus and method of manufacturing semiconductor device | Masahiro Oka, Yasuhiro Sugimoto, Masahiro Horigome, Yuuki Kobayashi | 2016-10-18 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Yuichiro Morozumi, Katsushige Harada, Kazuhide Hasebe +1 more | 2016-01-05 |
| 9165771 | Pulsed gas plasma doping method and apparatus | Peter L. G. Ventzek, Takenao Nemoto, Yuuki Kobayashi, Masahiro Horigome | 2015-10-20 |
| 9034774 | Film forming method using plasma | Kouji Tanaka | 2015-05-19 |
| 9029249 | Plasma doping apparatus and plasma doping method | Masahiro Oka, Masahiro Horigome, Yuuki Kobayashi | 2015-05-12 |
| 8497214 | Semiconductor device manufacturing method | Toshihisa Nozawa, Takaaki Matsuoka, Akinobu Teramoto, Tadahiro Ohmi | 2013-07-30 |
| 8486792 | Film forming method of silicon oxide film, silicon oxide film, semiconductor device, and manufacturing method of semiconductor device | Yoshinobu Tanaka, Yusuke Ohsawa, Toshihisa Nozawa, Takaaki Matsuoka | 2013-07-16 |
| 7458697 | Lamp cooling device and rear projection display apparatus | — | 2008-12-02 |
| 7366051 | Word line driver circuitry and methods for using the same | — | 2008-04-29 |
| 7269091 | Word line driver circuitry and methods for using the same | — | 2007-09-11 |
| 7268402 | Memory cell with trench-isolated transistor including first and second isolation trenches | Keiji Jono, Hiroyuki Watanabe | 2007-09-11 |