Issued Patents All Time
Showing 1–25 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359308 | Film forming method and semiconductor production apparatus | Yusuke Suzuki, Tsuyoshi Moriya, Atsushi Endo, Satoshi Tanaka | 2025-07-15 |
| 12288671 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2025-04-29 |
| 11881379 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2024-01-23 |
| 11404272 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2022-08-02 |
| 11404271 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2022-08-02 |
| 10879066 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2020-12-29 |
| 10822714 | Method of growing crystal in recess and processing apparatus used therefor | Yoichiro CHIBA, Daisuke Suzuki | 2020-11-03 |
| 10191378 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2019-01-29 |
| 10176992 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2019-01-08 |
| 10141187 | Mask pattern forming method, fine pattern forming method, and film deposition apparatus | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2018-11-27 |
| 9970110 | Plasma processing apparatus | Jun Ogawa, Akira Shimizu | 2018-05-15 |
| 9920422 | Method and apparatus of forming silicon nitride film | Akinobu Kakimoto | 2018-03-20 |
| 9865457 | Nitride film forming method using nitrading active species | Akira Shimizu | 2018-01-09 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuya Takahashi, Katsuhiko Komori, Yoshikazu Furusawa, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9613838 | Batch-type vertical substrate processing apparatus and substrate holder | Mitsuhiro Okada | 2017-04-04 |
| 9353442 | Apparatus for forming silicon-containing thin film | Mitsuhiro Okada, Akinobu Kakimoto | 2016-05-31 |
| 9343292 | Stacked semiconductor device, and method and apparatus of manufacturing the same | Tomoyuki Obu, Masaki Kurokawa | 2016-05-17 |
| 9263250 | Method and apparatus of forming silicon nitride film | Akinobu Kakimoto | 2016-02-16 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Hirokazu Ueda, Yuichiro Morozumi, Katsushige Harada +1 more | 2016-01-05 |
| 9190271 | Thin film formation method | Akinobu Kakimoto | 2015-11-17 |
| 9123782 | Amorphous silicon film formation method and amorphous silicon film formation apparatus | Hiroki Murakami, Akinobu Kakimoto | 2015-09-01 |
| 9006021 | Amorphous silicon film formation method and amorphous silicon film formation apparatus | Hiroki Murakami, Akinobu Kakimoto | 2015-04-14 |
| 9005459 | Film deposition method and film deposition apparatus | Akinobu Kakimoto, Satoshi Takagi, Toshiyuki Ikeuchi, Katsuhiko Komori | 2015-04-14 |
| 8946065 | Method of forming seed layer and method of forming silicon-containing thin film | Mitsuhiro Okada, Akinobu Kakimoto | 2015-02-03 |
| 8945339 | Film formation apparatus | Akinobu Kakimoto, Katsuhiko Komori | 2015-02-03 |