Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10570508 | Film forming apparatus, film forming method and heat insulating member | Satoshi Takagi, Mitsuhiro Okada, Masahisa Watanabe, Kazuya Takahashi, Kazuki Yano +1 more | 2020-02-25 |
| 9984875 | Film forming method | Kazuya Takahashi, Mitsuhiro Okada | 2018-05-29 |
| 9798317 | Substrate processing method and control apparatus | Yuichi Takenaga | 2017-10-24 |
| 9799577 | Heat treatment system, heat treatment method, and program | Yuichi Takenaga, Daisuke Suzuki | 2017-10-24 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Yoshikazu Furusawa, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9558940 | Method and apparatus for forming silicon film | — | 2017-01-31 |
| 9490139 | Method and apparatus for forming silicon film | Mitsuhiro Okada | 2016-11-08 |
| 9384974 | Trench filling method and processing apparatus | Daisuke Suzuki, Kazuya Takahashi, Mitsuhiro Okada, Satoshi Onodera | 2016-07-05 |
| 9318328 | Method and apparatus for forming silicon film | Akinobu Kakimoto, Mitsuhiro Okada, Nobuhiro Takahashi | 2016-04-19 |
| 9005459 | Film deposition method and film deposition apparatus | Akinobu Kakimoto, Satoshi Takagi, Toshiyuki Ikeuchi, Kazuhide Hasebe | 2015-04-14 |
| 8945339 | Film formation apparatus | Akinobu Kakimoto, Kazuhide Hasebe | 2015-02-03 |
| 7648895 | Vertical CVD apparatus for forming silicon-germanium film | Masaki Kurokawa, Norifumi Kimura, Kazuhide Hasebe, Takehiko Fujita, Akitake Tamura +1 more | 2010-01-19 |
| 7273818 | Film formation method and apparatus for semiconductor process | Masaki Kurokawa, Norifumi Kimura, Takehiko Fujita, Yoshikazu Furusawa, Kazuhide Hasebe | 2007-09-25 |
| 5695528 | Treating agent for cellulosic textile material and process for treating cellulosic textile material | Akira Saito, Seiji Shimura | 1997-12-09 |