Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11786946 | Cleaning method and film forming apparatus | Sung Duk SON, Shingo Hishiya | 2023-10-17 |
| 10460950 | Substrate processing system and substrate processing method | Yoshinobu Hayakawa, Satoshi MIZUNAGA, Yasuhiro Hamada, Mitsuhiro Okada | 2019-10-29 |
| 9920422 | Method and apparatus of forming silicon nitride film | Kazuhide Hasebe | 2018-03-20 |
| 9797067 | Selective epitaxial growth method and film forming apparatus | Daisuke Suzuki, Satoshi Onodera | 2017-10-24 |
| 9777366 | Thin film forming method | Atsushi Endo, Takahiro Miyahara, Shigeru Nakajima, Satoshi Takagi, Kazumasa Igarashi | 2017-10-03 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Katsuhiko Komori, Yoshikazu Furusawa, Mitsuhiro Okada +1 more | 2017-09-12 |
| 9646879 | Depression filling method and processing apparatus | Youichirou Chiba, Takumi YAMADA, Daisuke Suzuki | 2017-05-09 |
| 9490122 | Method and apparatus of forming carbon-containing silicon film | — | 2016-11-08 |
| 9425073 | Depression filling method and processing apparatus | Satoshi Onodera, Daisuke Suzuki | 2016-08-23 |
| 9353442 | Apparatus for forming silicon-containing thin film | Mitsuhiro Okada, Kazuhide Hasebe | 2016-05-31 |
| 9318328 | Method and apparatus for forming silicon film | Katsuhiko Komori, Mitsuhiro Okada, Nobuhiro Takahashi | 2016-04-19 |
| 9263250 | Method and apparatus of forming silicon nitride film | Kazuhide Hasebe | 2016-02-16 |
| 9190271 | Thin film formation method | Kazuhide Hasebe | 2015-11-17 |
| 9145604 | Thin film forming method and film forming apparatus | Atsushi Endo, Takahiro Miyahara, Shigeru Nakajima, Satoshi Takagi, Kazumasa Igarashi | 2015-09-29 |
| 9123782 | Amorphous silicon film formation method and amorphous silicon film formation apparatus | Kazuhide Hasebe, Hiroki Murakami | 2015-09-01 |
| 9005459 | Film deposition method and film deposition apparatus | Satoshi Takagi, Toshiyuki Ikeuchi, Katsuhiko Komori, Kazuhide Hasebe | 2015-04-14 |
| 9006021 | Amorphous silicon film formation method and amorphous silicon film formation apparatus | Kazuhide Hasebe, Hiroki Murakami | 2015-04-14 |
| 8946065 | Method of forming seed layer and method of forming silicon-containing thin film | Mitsuhiro Okada, Kazuhide Hasebe | 2015-02-03 |
| 8945339 | Film formation apparatus | Katsuhiko Komori, Kazuhide Hasebe | 2015-02-03 |
| 8895414 | Method and apparatus for forming amorphous silicon film | Satoshi Takagi, Kazumasa Igarashi | 2014-11-25 |
| 8815714 | Method of forming a germanium thin film | Shigeru Nakajima, Kazuhide Hasebe | 2014-08-26 |
| 8802547 | Method and apparatus for forming amorphous silicon film | Satoshi Takagi, Kazumasa Igarashi | 2014-08-12 |
| 8728957 | Thin film formation method and film formation apparatus | Kazuhide Hasebe | 2014-05-20 |
| 8679913 | Method for Sr—Ti—O-based film formation | Yumiko Kawano, Susumu Arima, Toshiyuki Hirota, Takakazu Kiyomura | 2014-03-25 |
| 8673086 | Method and device for cleaning a substrate and storage medium | Akitake Tamura, Kazuya Dobashi | 2014-03-18 |