Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344936 | Liquid raw material supplying method and gas supply apparatus | Hiroaki Dewa, Naohide Ito | 2025-07-01 |
| 10460950 | Substrate processing system and substrate processing method | Akinobu Kakimoto, Yoshinobu Hayakawa, Yasuhiro Hamada, Mitsuhiro Okada | 2019-10-29 |
| 9378944 | Method and apparatus of forming carbon film | Tomoyuki Obu, Takehiro Otsuka | 2016-06-28 |
| 9279183 | Film forming apparatus and method of operating the same | Atsushi Endo, Takehiro Otsuka | 2016-03-08 |
| 8993456 | Film forming apparatus and method of operating the same | Atsushi Endo, Takehiro Otsuka | 2015-03-31 |
| 7959737 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Yamato Tonegawa, Toshiharu Nishimura | 2011-06-14 |