Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8183158 | Semiconductor processing apparatus and method for using same | Masahiko Tomita, Kota Umezawa, Ryou Son | 2012-05-22 |
| 8080109 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi Takagi, Ryou Son, Masahiko Tomita, Yamato Tonegawa | 2011-12-20 |
| 7959737 | Film formation apparatus and method for using the same | Mitsuhiro Okada, Satoshi MIZUNAGA, Yamato Tonegawa | 2011-06-14 |
| 7923357 | Method for forming poly-silicon film | Mitsuhiro Okada, Takahiro Miyahara | 2011-04-12 |
| 7691445 | Film formation apparatus and method of using the same | Mitsuhiro Okada | 2010-04-06 |
| 7470637 | Film formation apparatus and method of using the same | Mitsuhiro Okada, Atsushi Endo | 2008-12-30 |
| 6110286 | Vertical processing unit | Seungho Oh, Katsutoshi Ishii, Yutaka Takahashi | 2000-08-29 |
| 5677235 | Method for forming silicon film | Kazuhide Hasebe | 1997-10-14 |
| 5654230 | Method of forming doped film | Shinichi Jintate, Yoshihiko Okamoto, Atsushi Hosaka | 1997-08-05 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Yuuichi Mikata +4 more | 1997-06-10 |
| 5622566 | Film-forming apparatus | Atsushi Hosaka, Mitsuaki Iwashita | 1997-04-22 |
| 5503875 | Film forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarily | Masayuki Imai | 1996-04-02 |
| 5380370 | Method of cleaning reaction tube | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Yuuichi Mikata +3 more | 1995-01-10 |
| 5294262 | Method of cleaning a process tube with ClF.sub.3 gas and controlling the temperature of process | — | 1994-03-15 |
| 5065441 | Image processing apparatus | Hiroyuki Yamamoto, Toshihiro Motoi, Tadao Kishimoto | 1991-11-12 |
| 4872033 | Image forming apparatus capable of processing various kinds of photosensitive material | Kazuo Watanabe, Masaki Kakutani | 1989-10-03 |
| 4774547 | Apparatus for forming images | Shunji Uchida, Masaki Kakutani | 1988-09-27 |