Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966258 | Method of growing gallium nitride-based crystal and heat treatment apparatus | Yosuke Watanabe | 2018-05-08 |
| 8183158 | Semiconductor processing apparatus and method for using same | Masahiko Tomita, Ryou Son, Toshiharu Nishimura | 2012-05-22 |
| 7981809 | Film formation method and apparatus for semiconductor process | Tetsuya Shibata, Yutaka Takahashi, Masahiko Tomita | 2011-07-19 |
| 7964241 | Film formation method and apparatus for semiconductor process | Kazuhide Hasebe, Pao-Hwa Chou, Kentaro Kadonaga, Hao-Hsiang Chang | 2011-06-21 |
| 7674724 | Oxidizing method and oxidizing unit for object to be processed | Keisuke Suzuki, Toshiyuki Ikeuchi | 2010-03-09 |
| 7605095 | Heat processing method and apparatus for semiconductor process | Toshiyuki Ikeuchi, Tetsuya Shibata | 2009-10-20 |
| 7452826 | Oxidation method and oxidation system | Kazuhide Hasebe, Yutaka Takahashi | 2008-11-18 |
| 7419550 | Oxidizing method and oxidizing unit of object for object to be processed | Keisuke Suzuki, Toshiyuki Ikeuchi | 2008-09-02 |
| 7208428 | Method and apparatus for treating article to be treated | Shingo Hishiya, Yoshikazu Furusawa, Teruyuki Hayashi, Misako Saito, Syoichi Sato | 2007-04-24 |
| 7129186 | Oxidation method and oxidation system | Kazuhide Hasebe, Yutaka Takahashi | 2006-10-31 |
| 6599845 | Oxidizing method and oxidation system | Shoichi Sato, Kazuhide Hasebe | 2003-07-29 |