Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615378 | Reduced-pressure drying apparatus | Akinori Shimamura | 2020-04-07 |
| 8950999 | Substrate processing apparatus and particle adhesion preventing method | Akitake Tamura | 2015-02-10 |
| 8945412 | Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus | Shigeru Kawamura | 2015-02-03 |
| 8809207 | Pattern-forming method and method for manufacturing semiconductor device | Hiraku Ishikawa, Takaaki Matsuoka, Yuji Ono | 2014-08-19 |
| 8674397 | Sealing film forming method, sealing film forming device, and light-emitting device | Hiraku Ishikawa | 2014-03-18 |
| 8647440 | Substrate processing method and substrate processing apparatus | Shigeru Kawamura | 2014-02-11 |
| 8608422 | Particle sticking prevention apparatus and plasma processing apparatus | Tsuyoshi Moriya, Hiroshi Nagaike, Kaoru Fujihara | 2013-12-17 |
| 8268185 | Method for analyzing quartz member | Kazuya Dobashi, Kohei Tsugita, Misako Saito | 2012-09-18 |
| 8040504 | Defect inspecting method and defect inspecting apparatus | Misako Saito, Kaoru Fujiwara | 2011-10-18 |
| 8021623 | Examination method and examination assistant device for quartz product of semiconductor processing apparatus | Masayuki Oikawa, Katsuhiko Anbai, Nobuhiro Takahashi | 2011-09-20 |
| 8008211 | Pattern forming method, semiconductor device manufacturing apparatus and storage medium | Akitake Tamura, Kaoru Fujihara | 2011-08-30 |
| 7993458 | Vacuum processing apparatus and method | Masaki Kondo, Misako Saito | 2011-08-09 |
| 7946152 | Apparatus and method for measuring the concentration of organic gas | Misako Saito | 2011-05-24 |
| 7923680 | Analysis method and analysis apparatus | Kazuya Dobashi, Shigeru Kawamura, Kohei Tsugita | 2011-04-12 |
| 7829044 | Phosphonamides, process for producing the same, and use thereof | Yoshikazu Makioka, Masato Tanaka, Li-Biao Han | 2010-11-09 |
| 7508518 | Particle measuring method and particle measuring apparatus | Akitake Tamura, Kaoru Fujihara | 2009-03-24 |
| 7420118 | Electric wire and cable with coating/covering of polyvinyl chloride family resin composition | Kiyoshi Watanabe, Hiroyuki Ito, Misako Saito, Naoya Hirayama, Sadao Kobayashi +1 more | 2008-09-02 |
| 7208428 | Method and apparatus for treating article to be treated | Shingo Hishiya, Yoshikazu Furusawa, Misako Saito, Kota Umezawa, Syoichi Sato | 2007-04-24 |
| 6949621 | Polymer containing 9-oxo-9-phosphafluorene-2,7-diyl skeleton in backbone and process for producing the same | Yoshikazu Makioka, Masato Tanaka | 2005-09-27 |
| 6903264 | Electric wire coated with polyvinyl chloride resin composition and cable | Kiyoshi Watanabe, Hiroyuki Ito, Misako Saito, Naoya Hirayama, Sadao Kobayashi +1 more | 2005-06-07 |
| 6787241 | Film obtained from silsesquioxane polymer and method of preparing same | Toshiaki Kobayashi, Masato Tanaka, Kouichi Yamaguchi | 2004-09-07 |
| 6774200 | Silsesquioxane polymer molding and method of preparing same | Toshiaki Kobayashi, Masato Tanaka | 2004-08-10 |
| 6753401 | Silcon-containing polymers | Poreddy Narsi Reddy, Masato Tanaka | 2004-06-22 |
| 6537347 | Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus | Satoshi Motouji, Iichi Hirao, Misako Saito | 2003-03-25 |
| 6403498 | Method and device for treating substrate | Takenobu Matsuo, Tsuyoshi Wakabayashi, Misako Saito | 2002-06-11 |