Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344387 | Wafer boat and film formation method | Kazuhide Hasebe, Atsumi Ito, Kenji Tago | 2002-02-05 |
| 6331890 | Thickness measuring apparatus, substrate processing method, and substrate processing apparatus | Yoshinori Marumo | 2001-12-18 |
| 5151538 | Organosilicon compound and process for producing organosilicon compound | Toshiaki Kobayashi, Masato Tanaka | 1992-09-29 |
| 4370258 | Catalyst system for hydroformylation of olefins | Ikuei Ogata, Yasuziro Kawabata, Masato Tanaka | 1983-01-25 |
| 4229381 | Process for preparation of aldehydes | Ikuei Ogata, Yasuziro Kawabata, Masato Tanaka | 1980-10-21 |