Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344387 | Wafer boat and film formation method | Kazuhide Hasebe, Kenji Tago, Teruyuki Hayashi | 2002-02-05 |
| 6156121 | Wafer boat and film formation method | Kazuhide Hasebe, Kenji Tago | 2000-12-05 |