Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700156 | Method and apparatus for forming silicon oxide film | Kimiya Aoki, Katsushi Suzuki, Asami Shirakawa, Keisuke Suzuki, Kazuo Saki +1 more | 2010-04-20 |
| 6925731 | Thin film forming apparatus cleaning method | Kazuaki Nishimura, Yukio Tojo, Phillip Spaull | 2005-08-09 |
| 6344387 | Wafer boat and film formation method | Kazuhide Hasebe, Atsumi Ito, Teruyuki Hayashi | 2002-02-05 |
| 6156121 | Wafer boat and film formation method | Kazuhide Hasebe, Atsumi Ito | 2000-12-05 |
| 5556275 | Heat treatment apparatus | Kazunari Sakata, Mitsuo Mizukami | 1996-09-17 |
| 5536320 | Processing apparatus | Harunori Ushikawa | 1996-07-16 |