Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8122850 | Method and apparatus for processing polysilazane film | Shingo Hishiya, Masahisa Watanabe | 2012-02-28 |
| 7926445 | Oxidizing method and oxidizing unit for object to be processed | Keisuke Suzuki, Toshiyuki Ikeuchi | 2011-04-19 |
| 7700156 | Method and apparatus for forming silicon oxide film | Katsushi Suzuki, Asami Shirakawa, Kenji Tago, Keisuke Suzuki, Kazuo Saki +1 more | 2010-04-20 |
| 7563481 | Method and apparatus for processing polysilazane film | Shingo Hishiya, Masahisa Watanabe | 2009-07-21 |
| 7304003 | Oxidizing method and oxidizing unit for object to be processed | Keisuke Suzuki, Toshiyuki Ikeuchi | 2007-12-04 |
| 7064084 | Oxide film forming method | Shingo Hishiya, Koji Akiyama, Yoshikazu Furusawa | 2006-06-20 |
| 6869892 | Method of oxidizing work pieces and oxidation system | Keisuke Suzuki, Toshiyuki Ikeuchi, David Paul Brunco, Steven R. Soss, Anthony Dip | 2005-03-22 |
| 6245673 | Method of forming tungsten silicide film | Kazuya Okubo, Tsuyoshi Takahashi, Kimihiro Matsuse | 2001-06-12 |