Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11585649 | Shift drum angle detecting device for transmission | Jun Adachi, Hiroyuki Kojima, Akira Tokito | 2023-02-21 |
| 10619247 | Substrate processing apparatus, injector, and substrate processing method | — | 2020-04-14 |
| 10573518 | Film forming method and vertical thermal processing apparatus | — | 2020-02-25 |
| 9758865 | Silicon film forming method, thin film forming method and cross-sectional shape control method | Kazuhide Hasebe, Kazuya Takahashi, Katsuhiko Komori, Mitsuhiro Okada, Hiroyuki Hayashi +1 more | 2017-09-12 |
| 9540743 | Amorphous silicon crystallizing method, crystallized silicon film forming method, semiconductor device manufacturing method and film forming apparatus | Kazuya Takahashi, Mitsuhiro Okada, Hiromasa YONEKURA | 2017-01-10 |
| 9478423 | Method of vapor-diffusing impurities | Kazuya Takahashi, Mitsuhiro Okada | 2016-10-25 |
| 8906792 | Impurity diffusion method, substrate processing apparatus, and method of manufacturing semiconductor device | Kazuya Takahashi, Mitsuhiro Okada | 2014-12-09 |
| 8518488 | Method for using apparatus configured to form germanium-containing film | Mitsuhiro Okada | 2013-08-27 |
| 7648895 | Vertical CVD apparatus for forming silicon-germanium film | Masaki Kurokawa, Katsuhiko Komori, Norifumi Kimura, Kazuhide Hasebe, Takehiko Fujita +1 more | 2010-01-19 |
| D588078 | Heat dissipation deterrence link for semiconductor manufacture | Mitsuhiro Okada, Daisuke Suzuki | 2009-03-10 |
| D588079 | Heat dissipation deterrence link for semiconductor manufacture | Mitsuhiro Okada, Daisuke Suzuki | 2009-03-10 |
| 7273818 | Film formation method and apparatus for semiconductor process | Masaki Kurokawa, Norifumi Kimura, Takehiko Fujita, Katsuhiko Komori, Kazuhide Hasebe | 2007-09-25 |
| 7208428 | Method and apparatus for treating article to be treated | Shingo Hishiya, Teruyuki Hayashi, Misako Saito, Kota Umezawa, Syoichi Sato | 2007-04-24 |
| 7064084 | Oxide film forming method | Shingo Hishiya, Koji Akiyama, Kimiya Aoki | 2006-06-20 |
| 5547580 | Purification method of crude product | Masahiko Tsujii, Hirofumi Kuroda, Katsuhiko Hirota | 1996-08-20 |