Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114321 | Apparatus and method for real-time sensing of properties in industrial manufacturing equipment | Sylvain Ballandras, Thierry LaRoche, Jacques Berg, Tomohide Minami | 2021-09-07 |
| 7829144 | Method of forming a metal film for electrode | Hayashi Otsuki | 2010-11-09 |
| 7153773 | TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system | Hayashi Otsuki, Kunihiro Tada | 2006-12-26 |
| 6919273 | Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film | Hayashi Otsuki, Kunihiro Tada | 2005-07-19 |
| 6861356 | Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film | Hayashi Otsuki | 2005-03-01 |
| 6838376 | Method of forming semiconductor wiring structures | Hayashi Otsuki | 2005-01-04 |
| 6576062 | Film forming apparatus and film forming method | — | 2003-06-10 |
| 6489208 | Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon | Masato Koizumi, Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto | 2002-12-03 |
| 6454909 | Method and apparatus for forming a film on an object to be processed | Sakae Nakatsuka, Kentaro Oshimo | 2002-09-24 |
| 6404021 | Laminated structure and a method of forming the same | Masato Koizumi, Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto | 2002-06-11 |
| 6251191 | Processing apparatus and processing system | — | 2001-06-26 |
| 6251188 | Apparatus for forming laminated thin films or layers | Tsuyoshi Hashimoto, Kazuya Okubo, Tsuyoshi Takahashi | 2001-06-26 |
| 6245673 | Method of forming tungsten silicide film | Kazuya Okubo, Tsuyoshi Takahashi, Kimiya Aoki | 2001-06-12 |
| 6022586 | Method and apparatus for forming laminated thin films or layers | Tsuyoshi Hashimoto, Kazuya Okubo, Tsuyoshi Takahashi | 2000-02-08 |
| 5997651 | Heat treatment apparatus | Tsuyoshi Hashimoto, Mitsuhiro Tachibana | 1999-12-07 |
| 5951772 | Vacuum processing apparatus | Hideki Lee, Hatsuo Osada, Sumi Tanaka | 1999-09-14 |
| 5647945 | Vacuum processing apparatus | Hideki Lee, Hatsuo Osada, Sumi Tanaka | 1997-07-15 |
| 4913790 | Treating method | Tomonori Narita | 1990-04-03 |