Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964790 | Method for forming metallic tungsten film | Masayuki Nasu | 2005-11-15 |
| 6625862 | Method of manufacturing a processing apparatus | Morio Kajiyama, Yasushi Aiba | 2003-09-30 |
| 6599367 | Vacuum processing apparatus | — | 2003-07-29 |
| 6454909 | Method and apparatus for forming a film on an object to be processed | Kimihiro Matsuse, Kentaro Oshimo | 2002-09-24 |
| 6036782 | Shower head | Sumi Tanaka, Mitsuhiro Tachibana | 2000-03-14 |