Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094694 | Substrate processing apparatus and substrate processing method | Tamihiro Kobayashi | 2024-09-17 |
| 11929234 | Plasma processing apparatus and lower stage | Taro Ikeda, Satoru Kawakami, Masaki Hirayama | 2024-03-12 |
| 11538667 | Stage, plasma processing apparatus, and plasma processing method | Taro Ikeda, Satoru Kawakami | 2022-12-27 |
| 9224623 | Microwave irradiation apparatus | Shigeru Kasai, Ryoji Yamazaki, Mitsutoshi ASHIDA, Yuji Obata | 2015-12-29 |
| 8440939 | Annealing device | Shigeru Kasai, Tomohiro Suzuki, Masatake Yoneda, Hiroyuki Miyashita | 2013-05-14 |
| 8246900 | Annealing apparatus | Shigeru Kasai, Hiroyuki Miyashita, Masatake Yoneda, Tomohiro Suzuki, Masamichi Nomura +1 more | 2012-08-21 |
| 8197601 | Vaporizer, vaporization module and film forming apparatus | — | 2012-06-12 |
| 7842229 | Substrate processing apparatus and substrate rotating device | Kouki Suzuki | 2010-11-30 |
| 7837828 | Substrate supporting structure for semiconductor processing, and plasma processing device | Taro Ikeda, Kaoru Yamamoto | 2010-11-23 |
| 7769279 | Heat treatment apparatus | Takayuki Kamaishi, Kouki Suzuki | 2010-08-03 |
| 7618494 | Substrate holding structure and substrate processing device | Tetsuya Saito, Masuhiro Natsuhara, Hirohiko Nakata | 2009-11-17 |
| 7547860 | Microwave plasma processing apparatus for semiconductor element production | Jun Yamashita | 2009-06-16 |
| 7250094 | Heat treatment apparatus | Takayuki Kamaishi, Kouki Suzuki | 2007-07-31 |
| 6733593 | Film forming device | Masatake Yoneda | 2004-05-11 |
| 6042653 | Susceptor for bearing an object to be processed thereon | Nobutaka Nakajima, Masato Koizumi | 2000-03-28 |
| 6036782 | Shower head | Sakae Nakatsuka, Mitsuhiro Tachibana | 2000-03-14 |
| 5972114 | Film deposition apparatus with anti-adhesion film and chamber cooling means | Tomihiro Yonenaga, Mitsuhiro Tachibana | 1999-10-26 |
| 5951772 | Vacuum processing apparatus | Kimihiro Matsuse, Hideki Lee, Hatsuo Osada | 1999-09-14 |
| 5647945 | Vacuum processing apparatus | Kimihiro Matsuse, Hideki Lee, Hatsuo Osada | 1997-07-15 |
| 5525160 | Film deposition processing device having transparent support and transfer pins | Yuichiro Fujikawa, Tomihiro Yonenaga, Hideki Lee | 1996-06-11 |
| 5332442 | Surface processing apparatus | Masao Kubodera, Masaki Narushima, Masahito Ozawa, Hiromi Kumagai, Tomihiro Yonenaga | 1994-07-26 |
| D340150 | Auxiliary music stand for a piano | — | 1993-10-12 |
| 4950982 | Electric probing test machine | Tadashi Obikane, Hisashi Koike | 1990-08-21 |
| 4901011 | Carrier for transferring plate-like objects one by one, a handling apparatus for loading or unloading the carrier, and a wafer probing machine fitted with the handling apparatus for the wafer carrier | Hisashi Koike | 1990-02-13 |