Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648610 | Baffle plate, apparatus for producing the same, method of producing the same, and gas processing apparatus containing baffle plate | Taro Komiya, Shigetoshi Hosaka, Tomihiro Yonenaga, Masayuki Tomoyasu | 2010-01-19 |
| 5951772 | Vacuum processing apparatus | Kimihiro Matsuse, Hideki Lee, Sumi Tanaka | 1999-09-14 |
| 5647945 | Vacuum processing apparatus | Kimihiro Matsuse, Hideki Lee, Sumi Tanaka | 1997-07-15 |
| 5445675 | Semiconductor processing apparatus | Masao Kubodera, Shigeru Kasai | 1995-08-29 |
| 5333986 | Transfer apparatus | Masami Mizukami | 1994-08-02 |