Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436203 | CVD apparatus and CVD method | Takeshi Kaizuka, Takashi Horiuchi, Takashi Mochizuki, Yumiko Kawano, Hideaki Yamasaki | 2002-08-20 |
| 6210486 | CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed | Takashi Mochizuki, Yumiko Kawano | 2001-04-03 |
| 6089184 | CVD apparatus and CVD method | Takeshi Kaizuka, Takashi Horiuchi, Takashi Mochizuki, Yumiko Kawano, Hideaki Yamasaki | 2000-07-18 |
| D424583 | Hinge unit for vacuum-processing a semiconductor wafer | — | 2000-05-09 |
| 6045862 | CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed | Takashi Mochizuki, Yumiko Kawano | 2000-04-04 |
| 6009667 | Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus | — | 2000-01-04 |
| 5474410 | Multi-chamber system provided with carrier units | Masahito Ozawa, Masanobu Kanazashi, Toshihiko Takasoe, Masaki Narushima, Masao Kubodera | 1995-12-12 |
| 5333986 | Transfer apparatus | Hatsuo Osada | 1994-08-02 |