Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436203 | CVD apparatus and CVD method | Takashi Horiuchi, Masami Mizukami, Takashi Mochizuki, Yumiko Kawano, Hideaki Yamasaki | 2002-08-20 |
| 6089184 | CVD apparatus and CVD method | Takashi Horiuchi, Masami Mizukami, Takashi Mochizuki, Yumiko Kawano, Hideaki Yamasaki | 2000-07-18 |
| 6063703 | Method for making metal interconnection | Hiroshi Shinriki, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 2000-05-16 |
| 6001736 | Method of manufacturing semiconductor device and an apparatus for manufacturing the same | Eiichi Kondo, Nobuyuki Takeyasu, Tomohiro Ohta, Yumiko Kawano, Shinpei Jinnouchi | 1999-12-14 |
| 5973402 | Metal interconnection and method for making | Hiroshi Shinriki, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1999-10-26 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1997-05-06 |
| 5521423 | Dielectric structure for anti-fuse programming element | Hiroshi Shinriki, Tomohiro Ohta | 1996-05-28 |