Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892975 | Method for selectively forming electric conductor and method for manufacturing semiconductor device | Michiru Hirose, Hitoshi Tanaka, Masayuki Satoh, Hisashi Yano, Masaki Yoshimaru | 2011-02-22 |
| 7651671 | Method of adding low-pressure gas continuously to supercritical fluid and apparatus therefor | — | 2010-01-26 |
| 7476619 | Semiconductor device | Vincent Vezin, Kenichi Kubo, Yoshinori Kureishi, Tomohiro Ohta | 2009-01-13 |
| 7450580 | Application layer multicast system and intermediate node therefor | Wataru Itonaga | 2008-11-11 |
| 6063703 | Method for making metal interconnection | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Hiroshi Yamamoto +3 more | 2000-05-16 |
| 5973402 | Metal interconnection and method for making | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Hiroshi Yamamoto +3 more | 1999-10-26 |
| 5952723 | Semiconductor device having a multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Yumiko Kawano, Tomoharu Katagiri, Tomohiro Ohta | 1999-09-14 |
| 5637534 | Method of manufacturing semiconductor device having multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Yumiko Kawano, Tomoharu Katagiri, Tomohiro Ohta | 1997-06-10 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Hiroshi Yamamoto +3 more | 1997-05-06 |
| 5552181 | Method for supplying liquid material and process for forming thin films using the liquid material supplying method | Toru Mitomo, Hiroshi Yamamoto, Tomohiro Ohta | 1996-09-03 |
| 5225245 | Chemical vapor deposition method for forming thin film | Tomohiro Ohta, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi | 1993-07-06 |
| 5209182 | Chemical vapor deposition apparatus for forming thin film | Tomohiro Ohta, Tohru Mitomo, Kenichi Otsuka, Hiroshi Sekihashi | 1993-05-11 |