Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7750654 | Probe method, prober, and electrode reducing/plasma-etching processing mechanism | Katsuya Okumura, Shigekazu Komatsu, Yuichi Abe, Kunihiro Furuya, Kenichi Kubo | 2010-07-06 |
| 7476619 | Semiconductor device | Eiichi Kondoh, Kenichi Kubo, Yoshinori Kureishi, Tomohiro Ohta | 2009-01-13 |
| 7323220 | Gas phase growth system, method of operating the system, and vaporizer for the system | Yasuhiko Kojima, Tomohisa Hoshino | 2008-01-29 |
| 6893953 | Fabrication process of a semiconductor device including a CVD process of a metal film | Tomohisa Hoshino, Gishi Chung | 2005-05-17 |
| 6548112 | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber | Joseph T. Hillman, Tugrul Yasar, Kenichi Kubo, Hideaki Yamasaki, Yasuhiko Kojima +2 more | 2003-04-15 |