Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117485 | Wafer inspection system | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2024-10-15 |
| 11762012 | Wafer inspection system | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2023-09-19 |
| 11567123 | Wafer inspection system | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2023-01-31 |
| 11119122 | Position correction method, inspection apparatus, and probe card | Shingo Ishida | 2021-09-14 |
| 11061071 | Wafer inspection system, wafer inspection apparatus and prober | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2021-07-13 |
| 10976364 | Test head and wafer inspection apparatus | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2021-04-13 |
| 10753972 | Wafer inspection system, wafer inspection apparatus and prober | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2020-08-25 |
| 9863977 | Method of contacting substrate with probe card | Hiroshi Yamada, Takanori Hyakudomi, Jun Mochizuki | 2018-01-09 |
| 9671459 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus | Junichi Hagihara, Shigekazu Komatsu, Tadayoshi Hosaka, Naoki Muramatsu | 2017-06-06 |
| 9140726 | Support body for contact terminals and probe card | Jun Mochizuki | 2015-09-22 |
| 8310257 | Contact structure for inspection | Shinichiro Takase, Jun Mochizuki | 2012-11-13 |
| 7750654 | Probe method, prober, and electrode reducing/plasma-etching processing mechanism | Katsuya Okumura, Shigekazu Komatsu, Yuichi Abe, Vincent Vezin, Kenichi Kubo | 2010-07-06 |
| 7023226 | Probe pins zero-point detecting method, and prober | Katsuya Okumura | 2006-04-04 |
| 6239602 | Temperature managing apparatus for multi-stage container | Yoichi NAKAGOMI, Hiroshi Tsukada | 2001-05-29 |
| 6084215 | Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein | Toshihiro Yonezawa, Ken Inoue, Yoichi NAKAGOMI | 2000-07-04 |
| 5708222 | Inspection apparatus, transportation apparatus, and temperature control apparatus | Toshihiro Yonezawa, Tsuyoshi Argua, Junichi Hagihara | 1998-01-13 |