Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117485 | Wafer inspection system | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2024-10-15 |
| 11762012 | Wafer inspection system | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2023-09-19 |
| 11567123 | Wafer inspection system | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2023-01-31 |
| 11061071 | Wafer inspection system, wafer inspection apparatus and prober | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2021-07-13 |
| 10976364 | Test head and wafer inspection apparatus | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2021-04-13 |
| 10753972 | Wafer inspection system, wafer inspection apparatus and prober | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2020-08-25 |
| 9671459 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus | Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu | 2017-06-06 |
| 8456186 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Kiyoshi Takekoshi, Hisatomi Hosaka, Kunihiko Hatsushika, Takamasa Usui, Hisashi Kaneko +2 more | 2013-06-04 |
| 8167521 | Substrate transfer apparatus and vertical heat processing apparatus | Ken Nakao, Hitoshi Kato | 2012-05-01 |
| 7981217 | Vertical heat treatment apparatus and method of transferring substrates to be processed | — | 2011-07-19 |
| 7859283 | Probe apparatus, probing method, and storage medium | Yasuhito Yamamoto, Masaru Suzuki | 2010-12-28 |
| 7791362 | Inspection apparatus | — | 2010-09-07 |
| 7777511 | Inspection apparatus having a capacitive pressure sensor between the mounting body and the support body | — | 2010-08-17 |
| RE41515 | Contactor and production method for contactor | Shinji Iino | 2010-08-17 |
| 7242206 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Kiyoshi Takekoshi, Hisatomi Hosaka, Kunihiko Hatsushika, Takamasa Usui, Hisashi Kaneko +2 more | 2007-07-10 |
| 7091733 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Kiyoshi Takekoshi, Hisatomi Hosaka, Kunihiko Hatsushika, Takamasa Usui, Hisashi Kaneko +2 more | 2006-08-15 |
| 6590381 | Contactor holding mechanism and automatic change mechanism for contactor | Shinji Iino, Kiyoshi Takekoshi | 2003-07-08 |
| 6438831 | Method of manufacturing an interconnector | — | 2002-08-27 |
| 6344752 | Contactor and production method for contractor | Shinji Iino | 2002-02-05 |
| 5825192 | Probe card device used in probing apparatus | — | 1998-10-20 |
| 5708222 | Inspection apparatus, transportation apparatus, and temperature control apparatus | Toshihiro Yonezawa, Tsuyoshi Argua, Kunihiro Furuya | 1998-01-13 |