Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8546185 | Method for manufacturing semiconductor device | Muneo Harada, Itaru Iida, Eiji Yamaguchi | 2013-10-01 |
| 8476560 | Thermal processing furnace | Makoto Kobayashi, Kenichi Yamaga | 2013-07-02 |
| 8470720 | Film forming apparatus and film forming method | Muneo Harada | 2013-06-25 |
| 8387559 | Semiconductor manufacturing plant | Jiro Hiraiwa, Osamu Yoshimoto, Hiroshi Hayakawa, Tetsuro Tojo, Tsuneyuki Okabe +3 more | 2013-03-05 |
| 8197600 | Vaporizer and semiconductor processing system | Hitoshi Kato, Tsuneyuki Okabe, Shigeyuki Okura | 2012-06-12 |
| 8167521 | Substrate transfer apparatus and vertical heat processing apparatus | Hitoshi Kato, Junichi Hagihara | 2012-05-01 |
| 8134100 | Heat processing furnace and method of manufacturing the same | Makoto Kobayashi | 2012-03-13 |
| 8033823 | Heat processing apparatus | Kazuhiko Kato | 2011-10-11 |
| 7888622 | Heat-processing furnace and manufacturing method thereof | Kenichi Yamaga, Makoto Kobayashi | 2011-02-15 |
| 7862638 | Gas supply system for semiconductor manufacturing apparatus | Shuji Moriya | 2011-01-04 |
| 7807587 | Substrate processing apparatus and substrate processing method | Hiroyuki Matsuura | 2010-10-05 |
| 7336892 | Reflection plate for semiconductor heat treatment and manufacturing method thereof | Kazuhiko Shimanuki, Hiroyuki Honma, Norihiko Saito, Hideyuki Yokoyama, Takanori Saito | 2008-02-26 |
| 7311520 | Heat treatment apparatus | Takanori Saito, Kenichi Yamaga | 2007-12-25 |
| 7207123 | Dry air-supplying apparatus and treating apparatus | Takashi Tanahashi, Takanobu Asano, Katsuhiro Yamashita | 2007-04-24 |
| 7150628 | Single-wafer type heat treatment apparatus for semiconductor processing system | Kenichi Yamaga | 2006-12-19 |
| 7102104 | Heat treatment system | Takanori Saito, Kenichi Yamaga | 2006-09-05 |
| 7072578 | Carbon wire heating object sealing heater and fluid heating apparatus using the same heater | Norihiko Saito, Hiroyuki Honma, Hiroshi Mori, Eiichi Toya, Tomio Konn +8 more | 2006-07-04 |
| 6885814 | Carbon wire heating object sealing heater and fluid heating apparatus using the same heater | Takanori Saito, Hiroshi Mori, Akira Otsu, Norihiko Saito, Hiroyuki Honma +8 more | 2005-04-26 |
| 6582649 | Parsion stabilizing method and system therefor for blow-molding machine | Shigeaki Sano, Sohei Masaki, Kunihiro Hijikata | 2003-06-24 |
| 6584279 | Heater sealed with carbon wire heating element | Sunao Seko, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Hideyuki Yokoyama +2 more | 2003-06-24 |
| 6515264 | Heater | Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura +3 more | 2003-02-04 |
| 6407371 | Heater | Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura +3 more | 2002-06-18 |
| 6204488 | Sealing terminal | Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Sunao Seko +4 more | 2001-03-20 |
| 6062853 | Heat-treating boat for semiconductor wafers | Tomohisa Shimazu | 2000-05-16 |
| 6043468 | Carbon heater | Eiichi Toya, Masahiko Ichishima, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura +7 more | 2000-03-28 |