Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8691367 | Micro channel structure body and method of manufacturing micro channel structure body | Hiroyuki Goto, Haruo Murayama, Susumu Kimijima | 2014-04-08 |
| 7090932 | Plasma resistant member | Yoshio Kobayashi, Yuu Yokoyama | 2006-08-15 |
| 6861122 | Ceramic member with fine protrusions on surface and method of producing the same | Kazuhide Kawai, Shunzo Shimai, Makoto Takahashi, Hiroaki Shitara, Fumio Tokuoka +3 more | 2005-03-01 |
| 6043468 | Carbon heater | Eiichi Toya, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura, Norihiko Saito +7 more | 2000-03-28 |
| 5868850 | Vapor phase growth apparatus | Eiichi Toya, Tadashi Ohashi, Masaki Shimada, Shinichi Mitani, Takaaki Honda | 1999-02-09 |
| 5324411 | Electrode plate for plasma etching | Yasumi Sasaki, Eiichi Toya, Masatoshi Kasahara, Ritsurou Makita | 1994-06-28 |