Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461428 | Method and apparatus for controlling rise and fall of temperature in semiconductor substrates | Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Hiroyuki Saito, Shinichi Mitani +6 more | 2002-10-08 |
| 6245313 | Process for manufacturing a product of glassy carbon | Kunihiko Suzuki, Shinichi Mitani, Tadashi Ohashi, Shuji Tobashi | 2001-06-12 |
| 6132519 | Vapor deposition apparatus and vapor deposition method | Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +1 more | 2000-10-17 |
| 6113705 | High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method | Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +2 more | 2000-09-05 |
| 6059885 | Vapor deposition apparatus and method for forming thin film | Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +1 more | 2000-05-09 |
| 5904769 | Epitaxial growth method | Tadashi Ohashi, Shinichi Mitani | 1999-05-18 |
| 5897710 | Substrate processing apparatus and substrate processing method | Yuusuke Sato, Toshimitsu Ohmine | 1999-04-27 |
| 5868850 | Vapor phase growth apparatus | Masahiko Ichishima, Eiichi Toya, Tadashi Ohashi, Masaki Shimada, Shinichi Mitani | 1999-02-09 |
| 5766360 | Substrate processing apparatus and substrate processing method | Yuusuke Sato, Toshimitsu Ohmine | 1998-06-16 |
| 5700992 | Zigzag heating device with downward directed connecting portions | Shinichi Mitani | 1997-12-23 |
| 5671323 | Zigzag heating device with downward directed connecting portions | Shinichi Mitani | 1997-09-23 |
| 5445491 | Method for multichamber sheet-after-sheet type treatment | Yoshinori Nakagawa, Shinichi Mitani, Takehiko Kobayashi | 1995-08-29 |
| 4940213 | Exhaust processing apparatus | Toshimitsu Ohmine, Keiiti Akagawa | 1990-07-10 |