| 6461428 |
Method and apparatus for controlling rise and fall of temperature in semiconductor substrates |
Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Hiroyuki Saito, Shinichi Mitani +6 more |
2002-10-08 |
| 6245313 |
Process for manufacturing a product of glassy carbon |
Kunihiko Suzuki, Shinichi Mitani, Tadashi Ohashi, Shuji Tobashi |
2001-06-12 |
| 6132519 |
Vapor deposition apparatus and vapor deposition method |
Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +1 more |
2000-10-17 |
| 6113705 |
High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method |
Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +2 more |
2000-09-05 |
| 6059885 |
Vapor deposition apparatus and method for forming thin film |
Tadashi Ohashi, Katuhiro Chaki, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata +1 more |
2000-05-09 |
| 5904769 |
Epitaxial growth method |
Tadashi Ohashi, Shinichi Mitani |
1999-05-18 |
| 5897710 |
Substrate processing apparatus and substrate processing method |
Yuusuke Sato, Toshimitsu Ohmine |
1999-04-27 |
| 5868850 |
Vapor phase growth apparatus |
Masahiko Ichishima, Eiichi Toya, Tadashi Ohashi, Masaki Shimada, Shinichi Mitani |
1999-02-09 |
| 5766360 |
Substrate processing apparatus and substrate processing method |
Yuusuke Sato, Toshimitsu Ohmine |
1998-06-16 |
| 5700992 |
Zigzag heating device with downward directed connecting portions |
Shinichi Mitani |
1997-12-23 |
| 5671323 |
Zigzag heating device with downward directed connecting portions |
Shinichi Mitani |
1997-09-23 |
| 5445491 |
Method for multichamber sheet-after-sheet type treatment |
Yoshinori Nakagawa, Shinichi Mitani, Takehiko Kobayashi |
1995-08-29 |
| 4940213 |
Exhaust processing apparatus |
Toshimitsu Ohmine, Keiiti Akagawa |
1990-07-10 |