Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6132519 | Vapor deposition apparatus and vapor deposition method | Tadashi Ohashi, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata, Shinichi Mitani +1 more | 2000-10-17 |
| 6113705 | High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method | Tadashi Ohashi, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata, Shinichi Mitani +2 more | 2000-09-05 |
| 6059885 | Vapor deposition apparatus and method for forming thin film | Tadashi Ohashi, Ping Xin, Tatsuo Fujii, Katsuyuki Iwata, Shinichi Mitani +1 more | 2000-05-09 |