Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124894 | Vapor phase growth apparatus and vapor phase growth method | Hideshi TAKAHASHI, Hideki Ito, Takanori HAYANO | 2021-09-21 |
| 11047047 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Hideshi TAKAHASHI | 2021-06-29 |
| 10920317 | Shower head, vapor phase growth apparatus and vapor phase growth method | Takumi YAMADA | 2021-02-16 |
| 10702956 | Flux activator, flux, and solder | Kazuhiro Yukikata, Junichi Aoki, Mitsuyasu Furusawa, Kimiaki Mori | 2020-07-07 |
| 10550473 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Hideshi TAKAHASHI | 2020-02-04 |
| 10407772 | Shower head, vapor phase growth apparatus, and vapor phase growth method | Takumi YAMADA, Hideshi TAKAHASHI | 2019-09-10 |
| 10385474 | Vapor phase growth apparatus and vapor phase growth method | Hideshi TAKAHASHI, Hideki Ito, Takanori HAYANO | 2019-08-20 |
| 10237917 | Heater and apparatus for manufacturing semiconductor device using heater | Hiroshi Furutani, Kunihiko Suzuki | 2019-03-19 |
| 10132001 | Vapor phase growth apparatus and vapor phase growth method | Hideshi TAKAHASHI, Shinichi Mitani | 2018-11-20 |
| 10109483 | Vapor phase growth apparatus, storage container, and vapor phase growth method | Hideshi TAKAHASHI | 2018-10-23 |
| 10011901 | Vapor deposition method and vapor deposition apparatus | Hideshi TAKAHASHI | 2018-07-03 |
| 9916996 | Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unit | Takumi YAMADA, Takanori HAYANO, Tatsuhiko IIJIMA | 2018-03-13 |
| 9869035 | Vapor phase growth apparatus and vapor phase growth method | Takumi YAMADA | 2018-01-16 |
| 9803282 | Vapor phase growth apparatus | Takumi YAMADA | 2017-10-31 |
| D798250 | Heater | Hiroshi Furutani | 2017-09-26 |
| D797690 | Heater for semiconductor manufacturing apparatus | Hiroshi Furutani | 2017-09-19 |
| 9735003 | Film-forming apparatus and film-forming method | Takumi YAMADA | 2017-08-15 |
| 9624603 | Vapor phase growth apparatus having shower plate with multi gas flow passages and vapor phase growth method using the same | Takumi YAMADA | 2017-04-18 |
| 9546435 | Vapor phase growth apparatus and vapor phase growth method | Takumi YAMADA | 2017-01-17 |
| 9194056 | Film-forming apparatus and method | Kunihiko Suzuki, Shinichi Mitani | 2015-11-24 |
| 8877405 | Fuel cell including membrane electrode assembly to maintain humidity condition | Kei Matsuoka | 2014-11-04 |
| 8835331 | Vapor-phase growing apparatus and vapor-phase growing method | — | 2014-09-16 |
| 8263282 | Fuel cell system and control method thereof | Ryosuke Yagi, Takahiro Suzuki, Eiichi Sakaue | 2012-09-11 |
| 8124291 | Fuel cell system and control method thereof | Ryosuke Yagi, Takahiro Suzuki, Eiichi Sakaue | 2012-02-28 |
| 8053120 | Fuel cell system and control method thereof | Ryosuke Yagi, Takahiro Suzuki, Eiichi Sakaue | 2011-11-08 |