Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9916996 | Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unit | Takumi YAMADA, Takanori HAYANO, Yuusuke Sato | 2018-03-13 |