Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365231 | Ammonium halide eliminator, chemical vapor deposition system and chemical vapor deposition process | Yuusuke Sato, Takashi Kataoka, Naoki Tamaoki | 2002-04-02 |
| 5991508 | Thermal processing apparatus with a shield between heater and substrate | Martin Schrems | 1999-11-23 |
| 5897710 | Substrate processing apparatus and substrate processing method | Yuusuke Sato, Takaaki Honda | 1999-04-27 |
| 5766360 | Substrate processing apparatus and substrate processing method | Yuusuke Sato, Takaaki Honda | 1998-06-16 |
| 5527393 | Vapor-phase deposition apparatus and vapor-phase deposition method | Yuusuke Sato | 1996-06-18 |
| 5474612 | Vapor-phase deposition apparatus and vapor-phase deposition method | Yuusuke Sato | 1995-12-12 |
| 5230925 | Gas-phase growing method and apparatus for the method | — | 1993-07-27 |
| 5205870 | Vapor deposition apparatus | Yuusuke Sato, Akio Ui, Keiichi Akagawa | 1993-04-27 |
| 5151133 | Vapor deposition apparatus | Keiichi Akagawa, Akira Ishihata | 1992-09-29 |
| 5088444 | Vapor deposition system | Keiichi Akagawa | 1992-02-18 |
| 5002011 | Vapor deposition apparatus | Keiichi Akagawa, Akira Ishihata | 1991-03-26 |
| 4940213 | Exhaust processing apparatus | Takaaki Honda, Keiiti Akagawa | 1990-07-10 |